한국표면공학회지 (35권6호 415-421)
High-temperature oxidation resistance of Ti-Si-N coating layers prepared by DC magnetron sputtering method
DC magnetron sputtering법으로 제조된 Ti-Si-N코팅막의 내산화성에 관한 연구
최준보;류정민;조건;김광호;이미혜;
Choi, Jun-Bo;Ryu, Jung-Min;Cho, Gun;Kim, Kwang-Ho;Lee, Mi-Hye;
부산대학교 재료공학부;기술신용보증기금 기술평가센터;
School of Materials Science and Engineering, Pusan National University;Technology Appraisal Center, Korea Technology Credit Gurantee Fund;
Ti-Si-N coating layers were codeposited on silicon wafer substrates by a DC reactive magnetron sputtering technique using separate titanium and silicon targets in
Ti-Si-N coating layers;DC magnetron sputtering;Oxidation resistance;