한국표면공학회지 (35권4호 199-205)
A comparative study on mechanical properties of TiN and TiAlN films prepared by Arc Ion Plating Technique
아크 이온 플레이팅법에 의해 증착된 TiN과 TiAlN 박막의 기계적 특성 비교
윤석영;이윤복;김광호;
부산대학교 공과대학 재료공학부;
TiN and TiAlN films were deposited on SKD 11 steel substrates by an arc ion plating (AIP) technique. The crystallinity and morphology for the deposited films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The mechanical properties of both films were investigated through the indentation, impact, and wear test. Those films fairly adherent to SKD 11 steel substrate, showed hardness values of 2300
AIP;TiN;TiAIN;Impact;Wear;