Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (33권5호 319-328)

A Study on Formation and Evaluation of he Thin Films for Improvement of Tribology Properties

Tribology특성 향상을 위한 Ag 박막의 형성과 평가에 관한 연구

이경황;이상기;송복한;정병진;박창남;문경만;이명훈;

한국해양대학교 부식방식공학연구소;FAG-한화 베어링 R&D 센타;

Abstract

Silver is known to have such characteristics as low shear strength, good transfer-film forming tendency, and good corrosion resistance. Silver thin films have been prepared by ion plating of physical vapour deposition (PVD) using both argon gas pressure and bias voltage of processing condition. After the silver films were prepared, the properties in them were examined by gas pressure and bias voltage of substrate. Their morphology and crystal orientation were investigated by scanning electron microscopy (SEM) and X-ray diffractor. The properties of film were, also, studied to relate with morphology, X-ray diffraction pattern, and friction coefficient at vacuum ambient. The friction coefficient was stabilized remarkably on deposited films with increasing argon pressure for deposition. Also, the effect of increasing of the bias voltage for deposition resulted in lower friction coefficient and stability in $1.7$ imes$10^{-4}$ torr. On the contrary, behavior of friction coefficient was stabilized on deposited films with decreasing the bias voltage in $1.7$ imes$10^{-5}$ torr for deposition.

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