Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (33권1호 38-47)

Ti(CN) coating on aluminum alloy formed by MO-PACVD

Al 합금에 MO-PACVD법으로 증착시킨 Ti(CN) 코팅 층의 물성에 관한 연구

김태형;김선규;;;
;;J. Woehle;K.-T. Rie;

현대전자(주);울산대학교 공과대학 재료금속공학부;
;Fraunhofer Institut fuer Schicht-und Oberflaechentechnik;Institut fuer Oberflaechentechnik und Plasmatechnische Werkstoffentwicklung, TU Braunschweig

Abstract

A Ti(CN) layer was formed on aluminum alloy by using diethylamino titanium, hydrogen and nitrogen with the pulsed DC PACVD process. Effect of process parameters such as precursor evaporation temperature, duty ratio, frequency, voltage, $H_2$/$N_2$gas ratio on the properties of Ti(CN) layer were investigated. The layer thus obtained had high hardness and low friction coefficient. Detailed results on the hardness, surface morphology, XRD, WDS analysis, wear test and scratch test of this layer are presented.

Keywords