저널

Stainless steel is being used widely for various purposes due to its good corrosion resistance. There has been much research to produce colored stainless steel by several methods such as anodizing and ion plating. In this experiment, we coated TiN(C,O,H)films SUS304 substraate with the DC magnetron spttering system made by Leybold Heraeus and studied the interlater structure and abhesive strength of the films as a function of additional gases, acetylene, hydrogen and oxygen. When the acetylene gas was added into the chamber, the specimen with the interlayer phase had good adhesion due to the toughness of the $gamma`-Fe_4N$ plase induced from a solid solution of carbon atoms, while low adhesion appeared on the specimen of the non interlayer phase. The formation of the interlayer phase($gamma`-Fe_4N$) was due to hydrogen embrittlement and internal stress induced by $gamma`-Fe_4N$ formation in the interlayer. We could fine the interlayer phase ($gamma`-Fe_4N$) at the interface between the film and the substrate of the TEM image when $gamma`-Fe_4N$ was detected by the X-ray duffraction metheod.