한국표면공학회지 (30권5호 298-309)
The Effect of Processing Parameters on the Mechanical Properties of TiN Films by the Pulsed DC PACVD
펄스형 DC PACVD 법에의해 미치는 공정인자의 영향
김진관;변응선;백운승;이구현;제창웅;윤재홍;이상로;
현제 현대전자 반도체 2연규소 FAB실 근무;한국기계연구원;창원기능대학;창원대학교 재료공학과;
Hard Tin coating on tool steel substrate were prepared using the pulsed PACVE. An orthogonal experimental design was employed to find the best deposition conditions for TiN coating and to systematically understand the effect of processing parameters. The small size Taguchi matrix called the L16 was used for experiment and ANOVA(ANalysis of VAriance) was followed to study the effect of main parameters on hardness and adhesion TiN coatings. In conclusion, pulse on/off time ratio and pulsing frequency were the major deposition parameters to determine hardness and adhesion of TiN coating in the pulsed DC PACVE process. (200) preferred orientation, columnar growth and dome-shaped surface morphology of the TiN films gave rise to a high hardness and a good adhesion to the substrates.
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