Electrohemical and optical properties of Ta$_2$O$_5$ thin film electrolyte EC windows
Ta$_2$O$_5$ 박막전해질 EC 창의 전기화학 및 광학적 특성에 관한 연구
김용혁;백지흠;조원일;윤경석;박인철;주재백;
한국과학기술연구원 화공연구부;한국과학시술원 화공연구부;(현)현대전자 TFT-LCD;홍익대학교 공과대학 화학공학과;
Tantalum oxide thin filme has an amorphous structure and a high resistivity. Its stoichiometric structure was $Ta_2O_{5.3}$ and the transmission ratio was 80%. The high resistivity of $Ta_2O_{5.3}$ thin film electrolyte made an EC windows without electrical shottness, but the bleached/colored cur rent was very low because of the low ion conductivith. Upon adding moisture into the system, the $Delta$T increased upto 25 %. proton concentration increase was the main cases to improve optical property. The influence of adding precious or transition metal film(~100 $AA$ thickness) in $Ta_2O_5$layer on the color change performance was observed. The metal insertion layers had formed hydroxide and they behaved as a stable proton source. The transmission diffrnece and cycle life were greatly enhanced in the case of Ti inssertion.The $Delta$T was 50% and the cycle life was 18, 000.
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