한국표면공학회지 (29권6호 829-833)
COMPOSITION OF SUPERCONDUCTING YBCO THIN FILMS WITH RF REACTIVE SPUTTERING CONDITIONS
Kim, H.H.;Kim, S.;Shin, S.H.;Park, J.I.;Park, K.J.;
Department of Electronic Engineering, Doowon Institute of Technology;Inorganic Chemistry Department, National Institute of Technology and Quality;
Superconducting YBaCuO thin films were deposited on MgO (100) single crystal substrate by rf reactive sputtering method. Sputtering target was prepared by mixing the original powders of