Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (29권6호 703-708)

AN APPLICATION OF PLASMA-POLYMERIZED YbPc$_2$ FILM: HUMIDITY SENSOR


Yamana, Masao;Kashiwazaki, Naoya;


Department of natural sciences, Faculty of Science and Engineering, Tokyo Denki University;Dept. of natural sciences, Faculty of Engineering, Tokyo Denki Univ.;

Abstract

Humidity sensing cheracterisrics of vacuum deposited plasma poly merized $YbPc_2$ films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than $38^{circ}C$ of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.

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