Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (28권6호 376-385)

Microstructural Observation of Cu/Cr Multilayers by Heat Treatment

열처리에 따른 Cu/Cr 다층 박막의 미세 조직 관찰

양혁수;김기범;

서울대학교 금속공학과;

Abstract

Copper-chromium multilayers with a nominal bilayer thickness of about 400 $AA$ (200 $AA$ each) were prepared by dc magnetron sputtering and the evolution of microstructure during heat treatment was investigated by using x-ray diffractometry(XRD), Auger electron spectroscopy(AES) and transmission electron microscopy(TEM). It was observed that an amorphous phase with a thickness of about 40 $AA$ was formed at the interfaces of the as-deposited Cu/Cr multilayered film using cross-sectional TEM. At elevated temperatures, the Cu(111) reflection showed increasing intensity and decreasing line-width as a result of copper grain growth. The intermixed amorphous phase disappeared after annealing at $250^{circ}C$ for 1 h and the multilayer structure was stable up to $400^{circ}C$ for 1 h annealing. At $600^{circ}C$ annealing, it was observed that the multilayer structure was completely destroyed and copper and chromium phases were fully intermixed.

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