한국표면공학회지 (27권4호 185-192)
Fabrication of Permalloy Thin Film by Electrodeposition
전해법에 의한 퍼말로이 박막의 제조
최영식;김성은;강탁;손헌준;
Choi, Young-Sik;Kim, Seong-Eun;Kang, Tak;Sohn, Hun-Joon;
서울대학교 공과대학 금속공학과;서울대학교 공과대학 자원공학과;
Dept. of Metallurgical Eng., Seoul Nat. Univ.;Dept. of Mineral and Petroleum Eng., Seoul Nat. Univ.;
The electrodeposition of permalloy thin film on various substrates was carried out using a paddle cell. The magnetic properties of film deposited were affected mostly by the Fe content in permalloy film and the effect of heat treatment in the presence of applied magnetic field was investigated. The optimum conditions for the electrodeposition of permalloy for the application of thin film head were presented in terms of iron concentration in bath and applied current density.
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