한국표면공학회지 (26권2호 71-81)
The effects of plasma treatment of polyimide surface on the adhesion of chromium/polyimide
크롬/폴리이미드의 접착력에 미치는 폴리이미드 표면의 플라즈마 처리의 효과
정태경;김영호;유진;
Chung, Tae-Gyeong;Kim, Young-Ho;Yu, Jin;
한국과학기술원 전자재료공학과;한양대학교 재료공학과;
Dept. of Electronic Materials Engineering, KAIST;Dept. of Materials Engineering, Hanyang University;
Thed effects of Ar or Oxygen RF plasma treatment on the adhesion behavior of Cr films to polyimide sub-strates have been investigated by using SEM, XRD, AES, and