한국표면공학회지 (24권3호 137-143)
Grain Growth By The Thermal Spike Effect of the Ion Irradiation
이온선 조사의 열충격 효과에 의한 grain 성장
김성수;송종환;채근화;주장헌;우정주;이임렬;황정남;김현경;문대원;
연세대학교 물리학과;한국 표준 연구소;한국 표준 연구원;
The relation between the ion irradiation induced grain growth and the basic parameters sinvolved in ion beam mixing process was studied. TEM micrographs showed that a significant grain growth has been induced by Ar+ irradiation at room temperature. The grain size increases rapidly in low dose region, while it approaches a saturated value in high dose region, and it has close relationship with nuclear energy deposition and thermodynamic properties such as cohesive energy ( Hc) and heat of mixing ( Hm). A model for the grain growth based on the thermal spike induced atomic migration was developed and applied to interpret experimental results.