한국표면공학회지 (21권3호 114-129)
Physical Vapour Deposition Fundamentals and Technical Aspects
Juhn, Hermann A.;
Forschungsinstitut fur Edelmetalle und Metallchmi;
The principles of the physical vapour deposition processes(PVC); evaporation, sputting, and ion plating are presented and compared with each other with respect to coating properties, deposition rate and process control. The significance of coating sources and vacuum equipment for hard materials coating is discussed.
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