The Change of Physical Properties of Thin Metal Film with than Evaporating Incident Angles
증착 입사각에 따른 금속박막의 물성 변화
진희창;조현춘;백수현;
Jin, Hui-Chang;Jo, Hyeon-Chun;Baek, Su-Hyeon;
한양대학교 공과대학 재료공학과;
Dep`t of Materials Eng. HanYang Univ.;
Chromium and Aluminum films were deposited by evaporation technique in $3{ imes}10^{-6}$ mbar vacuum level at the incident angles ranging from $0^{circ};to;60^{circ}$ with various evaporation rates. We measured the sheet resistances and light transmittances, and observed diffraction patterns by TEM of these films. Relations among diffraction patterns, sheet resistances and light transmittances were discussed. The sheet resistances and light transmittances were shown the lowest values at 25$^{circ}C$ of incident angle for all kinds of evaporation rates.
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