한국표면공학회지 (54권6호 357-364)
Effect of fluorine gas addition for improvement of surface wear property of DLC thin film deposited by using PECVD
PECVD를 이용한 DLC 박막의 표면 마모 특성 향상을 위한 플루오린 첨가의 영향
박현준ab, 김준형c, 문경일a*
Hyun-Jun Parkab, Jun-Hyung Kimc, Kyoung-Il Moona,*
a한국생산기술연구원, b인하대학교 신소재공학과, c㈜풍산
aHeat Treatment R&D Group, Korea Institute of Industrial Technology, Gyeounggi-do 150014, Korea bDepartment of Materials Science and Engineering, Inha University, Incheon 22212, Korea cPoongsan Co., Ltd.,
In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF4 treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp3 (like diamond) peak and sp2 (like graphite) peak. And the hydrogen contents in the DLC films (F-DLC) were measured by RBS analysis. In addition, DLC films were analyzed by scratch test for adhesion, nano-indentation for hardness and tribo-meter of Ball-on-disc type for friction coefficient. In the result of analysis, DLC films had traditional structure regardless of variation of hardness at constant conditions. Also adhesion of DLC film was increased as higher material hardness. Otherwise, friction coefficient was increased as lower material hardness. The DLC films were treated by CF4 plasma treatment to enhance the properties of super-hydrophobic. And the DLC films were measured by ESEM(Enviromental Scanning Electron Microscope) for water condensation.
PECVD, F-DLC, Super-hydrophobic, CF4
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