Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (54권6호 324-330)

Evaluating the performance and characteristics of Rutile TiO2 thin film for Triboelectric Nanogenerator (TENG)

Triboelectric Nanogenerator (TENG)를 위한 Rutile TiO2 박막 성능 및 특성 평가

문지현a, ∇, 김한재a, ∇, 김효배a, *, 안지훈a, *
Ji-Hyeon Moon a, ∇, Han-Jae Kim a, ∇, Hyo-Bae Kim a, *, Ji-Hoon Ahn a, *

a한양대학교 ERICA 재료화학공학과
aDepartment of Materials Science and Chemical Engineering, Hanyang university, 55 Hanyangdaehak-ro, Sangnok-gu, Ansan 15588, Gyeonggi-do, Republic of Korea

DOI : 10.5695/JKISE.2021.54.6.324

Abstract

As energy harvesting technology becomes important in relation to environmental issues, piezoelectric materials that convert mechanical energy into electrical energy are attracting attention. However, PZT, a representative material for piezoelectricity, is becoming difficult to use due to the problem that its components can cause environmental pollution. For this reason, recent research suggests a triboelectric nanogenerator (TENG) that generates energy through the combined effect of triboelectricity and electric induction for alternative piezoelectric devices. In TENG, electrical power is determined by the dielectric constant, thickness, and grain generation of the charged material. Therefore, in this study, a Rutile phase TiO2 thin film with high dielectric constant was formed using the spin-coating process and the effect of annealing was investigated. For electrical analysis, a TENG device was fabricated using PTFE as a material with an opposite charge, and electrical output according to film thickness and grain formation was comparatively analyzed.

Keywords

TiO2, PTFE, Triboelectric nanogenerator, Sol-gel process, Energy harvesting