한국표면공학회지 (54권6호 307-314)
Improved Adhesion of DLC Films by using a Nitriding Layer on AISI H13 Substrate
Min-Seok Park1,2, Dae-Young Kim1,2, Chang-Seouk Shin3, Wang Ryeol Kim4,*
1Ness Co, Busan, Republic of Korea 2Mechanical Engineering, Pukyong National University, Busan, Republic of Korea 3School of Mechanical Engineering, Pusan National University, Busan, Republic of Korea 4Dongnam Division, Korea Institute of Industrial Technology, Yangsan, Republic of Korea
Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.
DLC Coating, Plasma nitriding, Adhesion, Active screen
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