한국표면공학회지 (53권6호 343-350)
Mechanical Properties of MoN-Cu Coatings according to Pre-treatment of AISI H13 Tool Steel
H13 공구강의 전처리에 따른 Mo-Cu-N 코팅의 기계적 특성
박현준;문경일;김상섭;
Park, Hyun-Jun;Moon, Kyoung-Il;Kim, Sang-Sub;
한국생산기술연구원 열처리그룹;인하대학교 신소재공학과;
Heat Treatment R&D Group, Korea Institute of Industrial Technology;Department of Materials Science and Engineering, Inha University;
The degradation of mechanical properties of nitride coatings to steel substrates is one of the main challenges for industrial applications. In this study, plasma nitriding treatment was used in order to increase the mechanical properties of Mo-Cu-N coating to the H13 tool steel. The nanostructured Mo-Cu-N coating was deposited using pulsed DC magnetron sputtering method with a single alloy Mo-Cu target. Mechanical properties of MoN-Cu coated samples after nitriding were found to be relatively better than non-nitrided MoN-Cu coating.
MoN-Cu thin film;Single alloy target;Pulsed DC magnetron Sputtering;Nanocomposite coating;Plasma nitriding;