Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (53권6호 306-311)

Mechanical Properties of DLC Films and Duplex Plasma Nitriding/DLC Coating Treatment Process

DLC 박막과 복합처리(Nitriding/DLC)한 박막의 기계적 특성 비교

박현준;김민채;김상섭;문경일;
Park, Hyun-Jun;Kim, Min-Chae;Kim, Sang-Sub;Moon, Kyoung-Il;

한국생산기술연구원;(주)일렉트로엠;인하대학교 신소재공학과;
Heat Treatment R&D Group, Korea Institute of Industrial Technology;Dongbu electronic materials Co., Ltd.;Department of Materials Science and Engineering, Inha University;

DOI : 10.5695/JKISE.2020.53.6.306

Abstract

In this work, diamond-like carbon (DLC) films are coated onto plasma nitrided AISI 4140 steel by DC-pulsed PECVD. One problem of DLC films is their very poor adhesion on steel substrates. The purpose of the nitriding was to enhance adhesion between the substrate and the DLC films. The white layer formation is avoided. Plasma nitriding increased adhesion from 8 N for DLC coating to 25 N for duplex coating. Duplex plasma nitriding/DLC coating was proven to be more effective in improving the adhesion. The purpose of the bond layer was to enhance adhesion between the substrate and the DLC films.

Keywords

Plasma nitriding;DLC;Duplex treatment;Adhesion force;