Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (53권3호 116-123)

Effect of Argon Ion Beam Incident Angle on Self-Organized Nanostructure on the Surface of Polyethylene Naphthalate Film

알곤 이온빔 입사각에 따른 Polyethylene Naphthalate 필름 표면의 자가나노구조화 분석

조경환;양준영;변은연;박영배;정성훈;김도근;이승훈;
Joe, Gyeonghwan;Yang, Junyeong;Byeon, Eun-Yeon;Park, Young-Bae;Jung, Sunghoon;Kim, Do-Geun;Lee, Seunghun;

재료연구소 표면기술연구본부;안동대학교 신소재공학부 청정에너지소재기술연구센터;
Surface Technology Division, Korea Institute of Materials Science;School of Materials Science and Engineering, Andong National University;

DOI : 10.5695/JKISE.2020.53.3.116

Abstract

Ion beam irradiation induces self-organization of nanostructure on the surface of polymer film. We show that the incident angle of Ar ions on polyethylene naphthalate(PEN) film changes self-organized nanostructure. PEN film was irradiated by argon ion beams with the ion incident angle of 0°, 30°, 45°, 60°, and 80°. Nanostructure was altered from dimple to ripple structure as the angle increases. The ripple structure changed to pillar structure after 60°due to that the shallow incident angle increased the ion energy transfer per depth up to 50 eV/Å, which value could induce excessive surface heating and oligomer formation reacting as a physical mask for anisotropic etching. And quantitative analysis of the nanostructures was adapted by using ABC model and fractal dimension theory.

Keywords

Surface treatment;Self-organized;Nanostructure;Polymer;Ion beam;Quantitative measurement;Masking by oligomer;