저널

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{circ}$ for an array with maximum tip-to-tip separation of 100 mm.

capacitive;leveling;lithography;arrayed tip;polymer pen;