한국표면공학회지 (52권4호 211-226)
The Properties of Multi-Layered Optical Thin Films Fabricated by Pulsed DC Magnetron Sputtering
Pulsed DC 마그네트론 스퍼터링으로 제조된 다층 광학박막의 특성
김동원;
Kim, Dong-Won;
경기대학교 신소재공학과;
Department of Advanced Materials Engineering, Kyonggi University;
Optical thin films were deposited by using a reactive pulsed DC magnetron sputtering method with a high density plasma(HDP). In this study, the effect of sputtering process conditions on the microstructure and optical properties of
antireflection film;Pulsed DC magnetron sputtering;multi-layer optical thin film;