한국표면공학회지 (52권3호 145-149)
The Influence of Ag Thickness on the Electrical and Optical Properties of ZnO/Ag/SnO2 Tri-layer Films
Park, Yun-Je;Choi, Jin-Young;Choe, Su-Hyeon;Kim, Yu-Sung;Cha, Byung-Chul;Kim, Daeil;
School of Materials Science and Engineering, University of Ulsan;Advanced Forming Processes R&D Group, Ulsan Regional Division, Korea Institute of Industrial Technology;
Transparent and conductive ZnO/Ag/SnO2 (ZAS) tri-layer films were deposited onto glass substrates at room temperature by using radio frequency (RF) and direct current (DC) magnetron sputtering. The thickness values of the ZnO and