Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (50권6호 480-485)

Soft Mold Imprinting Fabrication of Anti-reflection Film using Self-Organized Nanostructure Polymer Surfaces Irradiated by Ion Beams

이온빔 처리된 폴리머 표면의 자가나노구조화를 이용한 반사방지 필름 제조용 소프트 몰드 임프린팅 연구

이승훈;변은연;최주연;정성훈;유병길;김도근;
Lee, Seunghun;Byeon, Eun-Yeon;Choi, Juyeon;Jung, Sunghoon;Yu, Byeong-Gil;Kim, Do-Geun;

재료연구소 표면기술연구본부 플라즈마공정연구실;제이피이;
Surface Technology Department, Korea Institute of Materials Science;JPE;

DOI : 10.5695/JKISE.2017.50.6.480

Abstract

Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer between oxygen ion and the polymer surface induced cross-linking and scission reactions, resulting in self-organized nanostructures with regular patterns of the wavenumber of $5{mu}m^{-1}$. Post processes including ultra-violet curable resin coating and delamination fabricated anti-reflection films. The imprinted resin surface also showed the consistent wavenumber, $5{mu}m^{-1}$. Pristine PET, oxygen ion beam treated PET, and imprinted replica sample showed total transmittance of 91.04, 93.25, and 93.57-93.88%, respectively.

Keywords

Anti-reflection;Nano structure;Polymer;Ion beam;Soft mold;