Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (50권5호 411-420)

Effects of Pd Addition Amount and Method on the Characteristics of SnO2 Semiconductor Thick Films for Alcohol Gas Sensors

Pd 첨가량 및 첨가방법이 알코올 센서용 SnO2 반도체 후막 특성에 미치는 영향 연구

김준형;김형관;이호년;김현종;이희철;
Kim, Jun-Hyung;Kim, Hyeong-Gwan;Lee, Ho-Nyun;Kim, Hyun-Jong;Lee, Hee-Chul;

한국산업기술대학교 신소재공학과;한국생산기술연구원 표면처리그룹;
Department of Advanced Materials Engineering, Korea Polytechnic University;Surface Technology R&BD Group, Korea Institute of Industrial Technology;

DOI : 10.5695/JKISE.2017.50.5.411

Abstract

In this paper, two methods of making the Pd-added $SnO_2$ ($Pd-SnO_2$) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use $PdCl_2$ as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of $Pd-SnO_2$ made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with $PdCl_2$, grain size of the $PdCl_2$ fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free $Pd-SnO_2$ thick films were able to successfully fill the $30{mu}m$ gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% $Pd-SnO_2$ thick film made with PdCl2 showed gas responses ($R_{air}/R_{gas}$) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% $Pd-SnO_2$ thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% $Pd-SnO_2$ thick film with Pd-OAM has a specific surface area of $31.39m^2/g$.

Keywords

Alcohol gas sensor;Tin oxide;Pd additive;Ink dropping;