한국표면공학회지 (50권5호 315-321)
Fabrication of Si Inverted Pyramid Structures by Cu-Assisted Chemical Etching for Solar Cell Application
결정질 실리콘 태양전지의 효율개선을 위한 실리콘 역 피라미드 구조체 최적화
박진형;남윤호;유봉영;이정호;
Park, Jin Hyeong;Nam, Yoon-Ho;Yoo, Bongyoung;Lee, Jung-Ho;
융합화학공학과, 한양대학교 ERICA캠퍼스;
Department of Materials and Chemical Engineering, Hanyang University;
Antireflective pyramid arrays can be readily obtained via anisotropic etching in alkaline solution (KOH, NaOH), which is widely used in crystalline-Si (c-Si) solar cells. The periodic inverted pyramid arrays show even lower light reflectivity because of their superior light-trapping characteristics. Since this inverted pyramidal structures are mostly achieved using very complex techniques such as photolithograpy and laser processes requiring extra costs, here, we demonstrate the Cu-nanoparticle assisted chemical etching processes to make the inverted pyramidal arrays without the need of photolithography. We have mainly controlled the concentration of
Solar cell;Inverted pyramid;Maskless;Low reflectance;MaCE;