Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (50권2호 119-124)

A Study on Structure and Magnetic Properties of Fe-N Thin Films with Different DC Magnetron Sputtering Power and Time

증착 Power의 세기와 시간에 따른 Fe-N 박막의 구조와 자성 특성

한동원;박원욱;김종우;권아람;
Han, Dong-Won;Park, Won-Uk;Kim, Jong-Woo;Kwon, Ah-Ram;

인제대학교 에너지융합학과;재료연구소;한국생산기술연구원 동남지역본부;
Department of Energy Fusion Technology, Inje University;Korea Institute of Materials Science;Korea Institute of Industrial Technology;

DOI : 10.5695/JKISE.2017.50.2.119

Abstract

Due to the high saturation magnetization (~2.4 T), $Fe_{16}N_2$ is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with various power and deposition time by DC magnetron sputtering, in order to get high portion of $Fe_{16}N_2$ phase. Surface morphology, phase formation and magnetic properties were measured. As a result, Saturation magnetization and Remanence magnetization reach to ~2.45 T and 1.41T. But, Coercivity was not enough in this experiments. Its value lower than 100 Oe. Which is very close to theoretical value.

Keywords

DC Magnetron Sputtering;$Fe_{16}N_2$;Magnetic Property;Saturation and Remanence Magnetization;