한국표면공학회지 (49권6호 567-574)
Improvement of Sealing Property of Electrostatic Chuck by Applying Polysilazane Sealant
폴리실라잔계 실란트를 이용한 정전척 실링특성 향상 연구
최재영;박현수;손민규;정창오;김우병;
Choi, Jaeyoung;Park, Hyunsu;Son, Min Kyu;Jeong, Chang-oh;Kim, Woo-Byoung;
단국대학교 에너지공학과;와이엠씨 (주) 기술연구소;
Department of Energy Engineering, Dankook University;R&D Center, YMC Co., Ltd;
We have analyzed chemical properties of polysiloxane and polysilazane films, respectively, as sealing materials for electrostatic chuck (ESC) and have investigated the possibility of polysilazane as an alternative sealant to polysiloxane. It has been revealed that Si-O with organic bonding (
Electrostatic chuck;Polysiloxane;Polysilazane;Sealing material;