Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (49권6호 567-574)

Improvement of Sealing Property of Electrostatic Chuck by Applying Polysilazane Sealant

폴리실라잔계 실란트를 이용한 정전척 실링특성 향상 연구

최재영;박현수;손민규;정창오;김우병;
Choi, Jaeyoung;Park, Hyunsu;Son, Min Kyu;Jeong, Chang-oh;Kim, Woo-Byoung;

단국대학교 에너지공학과;와이엠씨 (주) 기술연구소;
Department of Energy Engineering, Dankook University;R&D Center, YMC Co., Ltd;

DOI : 10.5695/JKISE.2016.49.6.567

Abstract

We have analyzed chemical properties of polysiloxane and polysilazane films, respectively, as sealing materials for electrostatic chuck (ESC) and have investigated the possibility of polysilazane as an alternative sealant to polysiloxane. It has been revealed that Si-O with organic bonding ($Si-CH_3$) existed in polysiloxane films compared to only pure Si-O bonding in polysilazane films. The sealing property of polysilazane has been found outstanding even in a short time of application. In the polysiloxane films containing $H_2O$, pin holes have been found possibly due to $CO_2$ gas evolution, and low adhesion with Si substrate has been observed after heat stress test in connection with the existence of organic bonding. After acid resistance test in 0.5 vol.% HF, 68 wt.% $HNO_3$, and 37 wt.% HCl solution, polyilazane films have shown a longer survival times. Compared to the conventional polysiloxane sealant, polysilazane is expected as a new sealing material because of good thermal and chemical stability.

Keywords

Electrostatic chuck;Polysiloxane;Polysilazane;Sealing material;