Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (48권6호 292-296)

Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering

RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성

김동렬;배지환;황동현;손영국;
Kim, Dong Ryeol;Bae, Ji Hwan;Hwang, Dong Hyun;Son, Young Guk;

부산대학교 재료공학부;신라대학교 신소재공학과;
Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Silla University;

DOI : 10.5695/JKISE.2015.48.6.292

Abstract

Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{circ}C$ to $400^{circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{circ}C$ all substrates temperature.

Keywords

ITZO;transmittance;RF Magnetron sputtering;thin film;