한국표면공학회지 (48권6호 292-296)
Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering
RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성
김동렬;배지환;황동현;손영국;
Kim, Dong Ryeol;Bae, Ji Hwan;Hwang, Dong Hyun;Son, Young Guk;
부산대학교 재료공학부;신라대학교 신소재공학과;
Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Silla University;
Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from
ITZO;transmittance;RF Magnetron sputtering;thin film;