Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films
원자층 증착법에 의한 Al2O3 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향
윤은영;이우재;장경수;최현진;최우창;권세훈;
Yun, Eun Young;Lee, Woo-Jae;Jang, Kyung Su;Choi, Hyun-Jin;Choi, Woo-Chang;Kwon, Se Hun;
부산대학교, 재료공학부;(주)서영, 나노융합사업팀;부산테크노파크, 멤스나노부품생산센터;
School of Materials Science and Engineering, Pusan National University;Nano Convergence Team, Seo Yeong Co. Ltd.;MEMS/NANO Component Production Center;
DOI : 10.5695/JKISE.2015.48.2.50
$Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films.
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