한국표면공학회지 (48권1호 11-22)
Improvement in Long-term Stability of Pd Alloy Hydrogen Separation Membranes
팔라듐 합금 수소분리막의 내구성 향상
김창현;이준형;조성태;김동원;
Kim, Chang-Hyun;Lee, Jun-Hyung;Jo, Sung-Tae;Kim, Dong-Won;
경기대학교 SDM 전공;경기대학교 신소재공학과;
Department of SDM (Semiconductor Display Mechatronics), Kyonggi University;Department of Advanced Materials Engineering, Kyonggi University;
Pd alloy hydrogen membranes for hydrogen purification and separation need thermal stability at high temperature for commercial applications. Intermetallic diffusion between the Pd alloy film and the porous metal support gives rise to serious problems in long-term stability of Pd alloy membranes. Ceramic barriers are widely used to prevent the intermetallic diffusion from the porous metal support. However, these layers result in poor adhesion at the interface between film and barrier because of the fundamentally poor chemical affinity and a large thermal stress. In this study, we developed Pd alloy membranes having a dense microstructure and saturated composition on modified metal supports by advanced DC magnetron sputtering and heat treatment for enhanced thermal stability. Experimental results showed that Pd-Cu and Pd-Ag alloy membranes had considerably enhanced long-term stability owing to stable, dense alloy film microstructure and saturated composition, effective diffusion barrier, and good adhesive interface layer.
Pd alloy hydrogen membrane;Porous metal support;Sputtering;Long-term stability;Diffusion barrier;