Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (46권6호 283-289)

A Study on the Heat Transfer Characteristics and Performance of the High Temperature Range Heater Plate Using Liquid-Vapor Phase Change Heat Transfer

기-액 상변화 열전달식 고온 히터 플레이트의 작동 특성과 성능에 관한 연구

강환국;임광빈;
Kang, Hwan-Kook;Yim, Kwang-Bin;

동은에이티에스;신안산대학교 기계과;
Dongeun A.T.S;Dept. of Mechanical Engineering, Shin Ansan University;

DOI : 10.5695/JKISE.2013.46.6.283

Abstract

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.

Keywords

Heater plate;Liquid-vapor phase change;Uniform temperature;Uniform heat flux;