한국표면공학회지 (46권6호 242-247)
Microstructure, Mechanical, Oxidation and Corrosion Properties of Zr-Al-N Coatings Synthesized by the Hybrid Coating System
하이브리드 코팅 시스템에 의해 합성된 Zr-Al-N 박막의 미세구조와 기계적 특성, 산화 특성, 부식특성
최하송;장재호;안은솔;김광호;
Choi, Hasong;Jang, Jaeho;An, Eunsol;Kim, Kwang Ho;
부산대학교 재료공학부;한국생산기술연구원;
School of Materials Science and Engineering, Pusan National University;Korea Institute of Industrial Technology (KITECH);
Zr-Al-N coatings were synthesized by the hybrid coating system combining arc ion plating and DC magnetron sputtering from a Zr and an Al target in argon-nitrogen atmosphere, respectively. By changing the power applied on the Al cathodes, the Zr-Al-N coatings with various Al contents were deposited. The microstructure and chemical compositions of the Zr-Al-N coatings were studied by X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM). With increasing of Al content in the coatings, the solid solution (Zr, Al)N crystallites were observed in the Zr-Al-N coatings. The nanohardness of the Zr-Al-N coatings exhibited a maximum value of 42 GPa for the Zr-Al (7.9 at.%)-N, and decreased with further increase in Al content in the coatings. The oxidation and corrosion behavior of the Zr-Al-N coatings revealed better properties compared than those of ZrN coatings due to the formation of a solid solution.
Zr-Al-N;Oxidation resistance;Corrosion resistance;Hybrid coating system;
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