Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (46권2호 61-67)

The Formation of CIGS Thin Films by Sputter Coating Using Single Composite Target and Change of Microstructure with Heat Treatment

단일 복합 타겟으로 스퍼터 코팅된 CIGS 박막의 형성과 열처리에 따른 미세구조 변화

송영식;김종렬;
Song, Young Sik;Kim, Jongryoul;

한양대학교 금속재료과;
Department of Metallurgy and Materials Engineering, Hanyang University;

DOI : 10.5695/JKISE.2013.46.2.061

Abstract

Thin film solar cells have attracted much attention due to their high cell efficiency, comparatively low process cost, and applicability to flexible substrates. In particular, CIGS solar cells have been widely studied and produced because they demonstrated the highest cell efficiency. However, the deposition process of CIGS films generally includes the selenization process conducted at elevated temperature using toxic $H_2Se$ gas. To avoid this selenization process, CIGS thin films were, in this study, deposited by RF sputtering using single composite CIGS target. In addition, the effects of sputtering bias voltage and heat treatment on the microstructural and morphological changes in deposited CIGS films were investigated and discussed.

Keywords

CIGS;Sputtering;Solar cell;Single composite target;Heat treatment;Microstructure;