Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
Myoung, Hee-Bok;Zhang, Teng Fei;Park, Jong-Keuk;Kim, Doo-In;Kim, Kwang Ho;
School of Materials Science and Engineering, Pusan National University;Electronic Materials Center, Korea Institute of Science and Technology;National Core Research Center for Hybrid Materials Solution, Pusan National University;
DOI : 10.5695/JKISE.2011.45.6.232
Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a $TiB_2$ and a Cr target in argon-nitrogen environment, respectively. By changing the power applied on the Cr and $TiB_2$ cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the $CrTi_{0.1}B_{0.4}N_{1.3}$, and then decreased with further increase of Cr content in the coatings, and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of the Cr-Ti-B-N coatings revealed better properties due to the formation of a nanocomposite microstructure.
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