한국표면공학회지 (44권6호 269-276)
Tribology and Phase Evolution of Cr-Mo-N Coatings with Different Interlayer Condition
중간층 조건에 따른 Cr-Mo-N 막의 상형성 및 마찰마모 거동 연구
양영환;여인웅;박상진;임대순;오윤석;
Yang, Young-Hwan;Lyo, In-Woong;Park, Sang-Jin;Im, Dae-Sun;Oh, Yoon-Suk;
한국세라믹기술원 이천분원 엔지니어링세라믹센터;현대.기아 연구개발총괄본부 중앙연구소 기반기술연구팀;현대하이스코 연구개발팀;고려대학교 신소재공학과;
Engineering Ceramic Center, KICET;CAE & Materials Research Team, Central Advanced Research & Engineering Institute, Hyundai & Kia Corporate Research & Development Division;Hyundai Hysco, Research and Development team;Department of Materials Science and Engineering, Korea University;
Phase evolution and tribological behavior of Cr-Mo-N multi compositional films with different interlayer were investigated. The films were deposited by hybrid PVD (Physical Vapor Deposition) system consisted of dc unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. A pure molybdenum (Mo) was used as sputtering target and also a pure Cr was used as AIP target to form the Cr-Mo-N films. Various growth planes were found, no textured surface, in all of the multi composition films. Maximum value of microhardness was measured in Cr-Mo-N film with Mo interlayer as 29 GPa. Composition film was mainly showed the aspect of the adhesive wear than CrN film. The friction coefficient was decreased from 0.6 for pure CrN coating to 0.35 for Cr-Mo-N film with Mo interlayer. This result may come from the formation of metal oxide tribo-layer which is known as solid lubricant during the wear test.
Cr-Mo-N;Interlayer;Hybrid PVD;Tribology;Solid lubrication;
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