Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (42권6호 276-279)

Characteristics of ITO:Ce/PET Films for Flexible Display Applications

플렉시블 디스플레이 적용을 위한 ITO:Ce/PET 박막의 물성평가

김세일;강용민;권세희;정태동;이승호;송풍근;
Kim, Se-Il;Kang, Yong-Min;Kwon, Se-Hee;Jung, Tae-Dong;Lee, Seung-Ho;Song, Pung-Keun;

부산대학교 재료공학부;부산대학교 국가핵심연구센터;한국세라믹기술원 그린세라믹본부;
Department of Materials Science and Engineering, Pusan National University;National Core Research Center for Hybrid Materials Solution, Pusan National University;Green Ceramic Division, Korea Institute of Ceramic Engineering and Technology (KICET);

DOI : 10.5695/JKISE.2009.42.6.276

Abstract

ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO ($SnO_2$: 10 wt%) and $CeO_2$ doped ITO ($CeO_2$: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity $6.7{ imes}10^{-4}{Omega}cm$ was obtained from ITO:Ce film deposited using $CeO_2$ (3.0 wt%) doped ITO target. On hte other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of $CeO_2$ compared to $SnO_2$ and $In_2O_3$. Therefore, $CeO_2$ atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.

Keywords

Flexible display;Ce doped ITO;Magnetron sputtering;Bending test;