Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (42권5호 220-226)

Effect of Oxygen on the Microstructure and Mechanical Properties of Cr-O-N Coatings

Oxygen 함량에 따른 Cr-O-N 코팅막의 미세구조 및 기계적 특성에 관한 연구

윤준서;권세훈;박인욱;이정두;김광호;
Yun, Jun-Seo;Kwon, Se-Hun;Park, In-Wook;Lee, Jeong-Du;Kim, Kwang-Ho;

부산대학교 재료공학부;부산대학교 하이브리드소재 솔루션 국가핵심연구센터;콜로라도 광업대학교 차세대 코팅 및 표면처리 연구실;
School of Materials Science and Engineering, Pusan National University;National Core Research Center for Hybrid Materials Solution, Pusan National University;Advanced Coatings and Surface Engineering Laboratory (ACSEL), Colorado School of Mines;

DOI : 10.5695/JKISE.2009.42.5.220

Abstract

Cr-O-N coatings having different oxygen contents were deposited on Si wafer and SUS 304 substrates by an arc ion plating technique using Cr target in $Ar/O_2/N_2$ gaseous atmosphere. As increasing oxygen content in the coating, the microstructure of Cr-O-N coating changed from polycrystalline having NaCl structure to amorphous structure. Further increase of oxygen content resulted in phase transformation from amorphous to rhombohedral structure. From the variations of d value and average grain size, it was revealed that the maximum solubility of oxygen in Cr-O-N coating was about 21 at.%. And the maximum micro-hardness of 2751HK was obtained in this composition. The lowest friction coefficient was measured in the coating having 34.8 at.% of oxygen. However, more narrow width of wear track was found in the coating having 30.1 at.% of oxygen.

Keywords

Cr-O-N;Arc ion plating;Solid-solution;Hardness;Wear;