Electrical and Structural Properties of GAZO Films Deposited by DC Magnetron Co-sputtering System with Two Cathodes
DC 마그네트론 Co-sputtering 시스템을 이용하여 증착한 GAZO 박막의 전기적 및 구조적 특성
;박세훈;송풍근;
Jie, Luo;Park, Se-Hun;Song, Pung-Keun;
부산대학교 재료공학부;
Department of Materials Science and Engineering, Pusan National University;
DOI : 10.5695/JKISE.2009.42.3.122
Ga/Al doped ZnO (GAZO) thin films were prepared on non-alkali glass substrate by co-sputtering system using two DC cathodes equipped with AZO ($Al_2O_3$:2.0 wt%) target and GZO ($Ga_2O_3$:6.65 wt%) target. This study examined the influence of Al/Ga concentration and substrate temperature on the electrical, structural and optical properties of GAZO films. The lowest resistivity $1.95{ imes}10^{-3}{Omega}cm$ was obtained at room temperature. With increasing substrate temperature, resistivity of GAZO film decreased to a minimum value of $7.47{ imes}10^{-4}{Omega}cm$ at below $300^{circ}C$. Furthermore, when 0.05% $H_2$ gas was introduced, resistivity of GAZO film decreased to $6.69{ imes}10^{-4}{Omega}cm$. All the films had a preferred orientation along the (002) direction, indicating that the deposited films have hexagonal wurtzite structure formed by the textured growth along the c-axis. The average transmittance of the films was more than 85% in the visible light range.
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