한국표면공학회지 (42권2호 73-78)
Effect of Si on the Microstructure and Mechanical Properties of Ti-Al-Si-C-N Coatings
Si 함량에 따른 Ti-Al-Si-C-N 코팅막의 미세구조와 기계적 특성의 변화에 관한 연구
홍영수;권세훈;김광호;
Hong, Young-Su;Kwon, Se-Hun;Kim, Kwang-Ho;
부산대학교 재료공학부;부산대학교 하이브리드소재 솔루션 국가핵심연구센터;
School of Materials Science and Engineering, Pusan National University;National Core Research Center for Hybrid Materials Solution, Pusan National University;
Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the microstructure and mechanical properties of Ti-Al-C-N films were systematically investigated. It was revealed that the microstructure of Ti-Al-Si-C-N coatings changed from a columnar to a nano-composite by the Si addition. Due to the nanocomposite microstructure of Ti-Al-Si-C-N coatings, the microhardness of The Ti-Al-Si-C-N coatings significantly increased up to 56 GPa. In addition the average friction coefficients of Ti-Al-Si-C-N coatings were remarkably decreased with Si addition. Therefore, Ti-Al-Si-C-N coatings can be applicable as next-generation hard-coating materials due to their improved hybrid mechanical properties.
Ti-Al-Si-C-N;Hybrid coating system;Microstructure;Mechanical properties;
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