Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (41권5호 214-219)

Effect of RF Superimposed DC Magnetron Sputtering on Electrical and Bending Resistances of ITO Films Deposited on PET at Low Temperature

DC마그네트론 스퍼터링법으로 PET 기판위에 저온 증착한 ITO박막의 비저항과 굽힘 저항성에 대한 RF인가의 영향

박미랑;이성훈;김도근;이건환;송풍근;
Park, Mi-Rang;Lee, Sung-Hun;Kim, Do-Geun;Lee, Gun-Hwan;Song, Pung-Keun;

부산대학교 재료공학부;한국기계연구원 부설 재료연구소;
Department of Materials Science and Engineering, Pusan National University;Surface Technology Research Center, Korea Institute of Materials Science (KIMS);

DOI : 10.5695/JKISE.2008.41.5.214

Abstract

Indium tin oxide (ITO) films were deposited on PET substrate by RF superimposed DC magnetron sputtering using ITO (doped with 10 wt% $SnO_2$) target. Substrate temperature was maintained below $750^{circ}C$ without intentionally substrate heating during the deposition. The discharge voltage of DC power supply was decreased from 280 V to 100 V when superimposed RF power was increased from 0 W to 150 W. The electrical properties of the ITO films were improved with increasing of superimposed RF power. In the result of cyclic bending test, relatively high mechanical property was obtained for the ITO film deposited with RF power of 75 W under DC current of 0.75 A which could be attributed to the decrease of internal stress caused by decrease in both deposition rate and plasma impedance.

Keywords

Indium Tin Oxide (ITO);RF super-imposed DC sputtering;Magnetron sputtering;Flexible substrate;Bending test;