한국표면공학회지 (41권3호 88-93)
Characteristics of Ir-Re Thin Films on WC for Lens Glass Molding by Ion Beam Assisted DC Magnetron Sputtering
Ion beam assisted DC magnetron sputtering에 대한 렌즈 유리 성형용 WC 합금의 Ir-Re 박막 특성
박종석;박범수;강상도;양국현;이경구;이도재;이광민;
Park, Jong-Seok;Park, Burm-Su;Kang, Sang-Do;Yang, Kook-Hyun;Lee, Kyung-Ku;Lee, Doh-Jae;Lee, Kwang-Min;
전남대학교 신소재공학부;에이지 공학;타이타늄.특수합금부품개발지원센터;
Department of Materials Science and Engineering, Chonnam National University;A. G. Optics Co.;R&D Center for Titanium and Special Alloys;
Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100 nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.
Ir-Re;Ion beam assisted DC magnetron sputtering;Molding core;Tungsten carbide(WC);
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