Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (40권6호 279-282)

Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System

하이브리드 코팅시스템에 의해 제조된 Cr-Mo-Si-C-N 박막의 미세구조 및 기계적 특성연구

윤지환;안성규;김광호;
Yun, Ji-Hwan;Ahn, Sung-Kyu;Kim, Kwang-Ho;

부산대학교 재료공학과;부산대학교 국가핵심연구센터;
Division of Materials Science and Engineering, Pusan National University;National Core Research Center for Hybrid Materials Solution Materials, Pusan National University;

DOI : 10.5695/JKISE.2007.40.6.279

Abstract

Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

Keywords

Cr-Mo-Si-C-N;Hybrid system;Microstructure;Mechanical properties;