Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (40권6호 245-249)

Effects of Reactive Gas Addition on the Mechanical Property and Water Permeability of IZO Films Deposited by DC Sputtering for Application to Flexible OLED

DC 마그네트론 스퍼터로 증착한 flexible OLED용 IZO 박막의 기계적 특성과 투습특성에 미치는 반응성 가스 첨가의 효과

천고은;이동엽;조영래;송풍근;
Cheon, Ko-Eun;Lee, Dong-Yeop;Cho, Young-Rae;Song, Pung-Keun;

부산대학교 재료공학부;
School of Materials Science and Engineering, Pusan National University;

DOI : 10.5695/JKISE.2007.40.6.245

Abstract

Amorphous IZO films were deposited on PET substrate by DC magnetron sputtering without substrate heating. In order to investigate effect of reactive gas addition on film properties, 0.2-0.4% of $H_2$ or $O_2$ gas was introduced during the deposition. Deposited IZO films were evaluated with mechanical property, electrical property, and water permeability. In the case of $H_2$ gas addition, mechanical property showed clear degradation compared to $O_2$ gas. In the case of $O_2$ gas, water permeability of the IZO film was increased compared to $H_2$ gas which could be attributed to the low adhesion of the film caused by bombardment of high energy negative oxygen ion. As a result, it is confirmed that water permeability of the film could be strongly affected by adhesion of the film.

Keywords

OLED;IZO;TCO;Bending test;Mechanical property;Water permeability;DC magnetron sputtering;