Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (40권5호 203-208)

Electro-Chemical Properties of Iridium Oxide Coated Ti Electrode Synthesized by Unbalanced Magnetron Sputtering Process

비대칭 마크네트론 스퍼터링을 이용한 이리듐 산화물 박막의 합성과 전기 화학적 특성분석

김성대;김상식;송진호;
Kim, Sung-Dae;Kim, Sang-Sik;Song, Jin-Ho;

고등기술연구원 플라즈마팀;
Plasma Technology Center, Institute for Advanced Engineering;GREENPLA Co., Ltd.;

DOI : 10.5695/JKISE.2007.40.5.203

Abstract

Preliminary studies were conducted to develop a dimensionally stable anode (DSA)electrode prepared by reactive sputtering method. The microstructure, surface morphology and electrochemical properties of iridium oxide $(IrO_2)$ coatings synthesized by unbalanced magnetron sputtering (UBMS) and conventional DSA electrode were compared. In addition, the possibilities of $IrO_2$ films synthesized by UMB on a real DSA electrode were investigated by electro-chemical application test. The degree of non-stoichiometry and surface area were closely related to the electro-chemical activity of the $IrO_2$ electrode. The feasibility of making a DSA electrode prepared by PVD technique was demonstrated through the present work.

Keywords

Unbalanced magnetron sputtering;DSA electrode;iridium oxide;Electrochemical properties;