한국표면공학회지 (40권5호 203-208)
Electro-Chemical Properties of Iridium Oxide Coated Ti Electrode Synthesized by Unbalanced Magnetron Sputtering Process
비대칭 마크네트론 스퍼터링을 이용한 이리듐 산화물 박막의 합성과 전기 화학적 특성분석
김성대;김상식;송진호;
Kim, Sung-Dae;Kim, Sang-Sik;Song, Jin-Ho;
고등기술연구원 플라즈마팀;
Plasma Technology Center, Institute for Advanced Engineering;GREENPLA Co., Ltd.;
Preliminary studies were conducted to develop a dimensionally stable anode (DSA)electrode prepared by reactive sputtering method. The microstructure, surface morphology and electrochemical properties of iridium oxide
Unbalanced magnetron sputtering;DSA electrode;iridium oxide;Electrochemical properties;