Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (40권4호 185-189)

Statistical Analysis of Characteristics of Scanning Electron Microscope

주사전자현미경 특성의 통계적 해석

김태선;김우석;김동환;김병환;
Kim, T.S.;Kim, W.;Kim, D.H.;Kim, B.;

가톨릭대학교 정보통신전자공학부;세종대학교 전자공학과;서울산업대학교 기계설계자동화공학부;
School of Information, Communications & Electronics Engineering, The Catholic University of Korea;Department of Electronic Engineering, Sejong University;School of Mechanical Design & Automation Engineering, Seoul National University of Technology;

DOI : 10.5695/JKISE.2007.40.4.185

Abstract

A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and 2 (denoted as A and B, respectively), and Objective lens (coarse and fine-denoted as C and D respectively). A statistical analysis was conduced to investigate factor effects and variations In response surfaces. Among four factors, main effect analysis revealed that A and D were Identified as the dominant factor. Moreover, B showed conflicting effect against C. The $R^2$ of statistical regression model constructed was about 69.6%. The model generated 3D response surface plots facilitated understanding of complex tactor effects.

Keywords

SEM;Statistical analysis;Main effect;Response surface model;