한국표면공학회지 (40권1호 6-10)
Thermodynamics Consideration of Growth Mode of Silver Islands by Transition Metal Seeding
Nb seeding이 Ag 박막 성장모드에 미치는 영향에 대한 열역학적인 고찰
변응선;김동호;전상조;
Byon, Eung-Sun;Kim, Dong-Ho;Jeon, Sang-Jo;
한국기계연구원 표면기술연구센터;국방기술품질원 함정센터;
Surface Engineering Research Center, Korea Institute of Machinery and Materials;Shipbuilding Center, Defense Agency for Technology and Quality;
For low-emissivity application on window glass, coalescence of thin film silver islands is crucial for high transmittance in the visible and high reflectance in the infrared. It is well known that the underlayer affects the growth mode. In this work, the effect of the underlayer on the growth of silver films deposited by filtered cathodic vacuum arc is discussed. While a nominal 0.1 nm niobium underlayer has promoted the coalescence of silver islands, a 0.2 nm layer did not show these features. From a thermodynamic approach, Nb seeding less one monolayer is considered to reduce the surface energy between the silver atoms and
Thin film;Filtered cathodic vacuum arc;Coalescence;Nb seeding;Low-emissivity;