Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (40권1호 1-5)

Microstructural and Mechanical Characteristics of TiZrAlN Nanocomposite Thin Films by CFUBMS

CFUBMS을 이용한 TiZrAlN 나노복합 박막의 미세 구조와 기계적 특성

김연준;이호영;김용모;김갑석;한전건;
Kim, Youn-J.;Lee, Ho-Y.;Kim, Yong-M.;Kim, Kab-S.;Han, Jeon-G.;

성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터;
Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University;

DOI : 10.5695/JKISE.2007.40.1.001

Abstract

Quaternary TiZrAlN nanocomposite thin films were synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS), and their microstructure and mechanical characteristics were examined. The grain refinement of the TiZrAlN nanocomposite thin films was controlled by adjusting the $N_2$ partial pressure. The hardness of the film varied with the $N_2$ partial pressure and the maximum value was obtained approximately 47 GPa. It was also confirmed that there is a critical value of the grain size($d_c$) to need maximum hardness.

Keywords

TiZrAlN;Nanocomposite;CFUBMS;