Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (39권4호 153-159)

A Study on the Characteristics of Nanodiamond Films with the Gas Flow Control

가스 유량제어에 의한 나노다이아몬드 박막의 특성연구

김태규;김창훈;
Kim, Tae-Gyu;Kim, Chang-Hoon;

부산대학교 나노시스템공정공학과;한국부품소재산업진흥원 기술개발본부;
Dept. of Nano System & Process Engineering, Pusan National University;Korea Materials & Components Industry Agency;

Abstract

Nanodiamond films were deposited on Si substrate by introducing a time dependent on/off modulation of $CH_4;and;O_2$ flows in a vertical-type microwave plasma enhanced chemical vapor deposition system. Surface morphology and diamond quality of the film were investigated as a function of the on/off modulation time interval. The diamond nucleation density on the substrate was enhanced under low temperature and low pressure condition. In addition, the diamond nucleation density was enhanced by increasing the on/off modulation time interval. Enhanced diamond quality was noticeable under the condition of a longer on/off modulation time interval. It was suggested that the nanodiamond nuclei formed the cluster formation.

Keywords

Nanodiamond;On/off modulation time;Nano particle;Cluster;